-
Prof Souri Banerjee
- Senior Professor
- Birla Institute of Technology and Science, Pilani
Publications 1999 - 2024
Publications
-
30
Journal Articles
-
9
Conference
Proceedings -
1
Review
-
3
-
4
-
28
Citations / H-Index
457
Citations
11
h-index
363
Citations
Google Scholar
Expertise
Applied Physics
Extensive use of Clean Room ( Class-100 to 10,000), Photolithography and Mask making, Electron Beam Lithography (Minimum beam spot size of 10nm) equipped with mini-CAD for patterning and transfer of about 30 nm gap pattern, CVD, Etching, Oxidation Technique, Electron Beam Evaporator for very thin metal deposition, Field Emission type SEM to obtain image of narrow quantum well or narrow patterns, Thin film and nanocrystal deposition using different CVD techniques, Sputtering etc. Device Fabr
Personal Information
Prof Souri Banerjee
Male
Birla Institute of Technology & Science, Pilani Hyderabad Campus Jawaharnagar, Kapra Mandal
, Telangana, India - 500078
Experience
-
Senior Professor
Department of Physics
Birla Institute of Technology and Science, Pilani
-
Professor
Department of Physics
Birla Institute of Technology and Science, Pilani
Doctoral Theses Guided
2010
Investigation of the properties of plasma deposited silicon nitride thin films
Chopra, Siddheshwar, Birla Institute of Technology and Science Pilani
2010
Investigation of the properties of plasma deposited silicon nitride thin films
Chopra, Siddheshwar, Birla Institute of Technology and Science Pilani
